Abstract
We design the static and dynamic characteristics of a piezoelectric nanomicrotransducer intended for use in nanotechnology and microelectronic hardware, devise its parametric structural schematic diagram, and determine the influence of its physical and geometric parameters on its static and dynamic characteristics.
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V. K. Vardan, K. J. Vinoy, and K. A. Joze, RF MEMS and Their Applications (Wiley, 2003; Tekhnosfera, Moscow, 2004).
S.M. Afonin, “Piezoelectric Transducers for ControllingMicrodisplacements,” Prib. Sist. Upr., No. 2, 41–42 (1998).
S. M. Afonin, “Parametric Structural Diagram of a Piezoelectric Converter,” Izv. Akad. Nauk. Mekh. Tverd. Tela, No. 6, 101–107 (2002) [Mech. Solids (Engl. Transl.) 37 (6), 85–91 (2002)].
S. M. Afonin, “Parametric Block Diagram and Transfer Functions of a Composite Piezoelectric Transducer,” Izv. Akad. Nauk. Mekh. Tverd. Tela, No. 4, 150–160 (2004) [Mech. Solids (Engl. Transl.) 39 (4), 119–127 (2004)].
W. Mason (Editor) Physical Acoustics, Vol. 1, Part A:Methods and Devices of Ultrasonic Studies (Mir, Moscow, 1966) [in Russian].
V. V. Kalinchuk and T. I. Belyankova, Dynamic Contact Problems for Prestressed Electroelastic Media (Fizmatlit, Moscow, 2006) [in Russian].
Yu. D. Pervitskii, Design and Analysis of Precise Mechanisms (Mashinostroenie, Leningrad, 1976) [in Russian].
V. A. Besekerskii and E. P. Popov, Theory of Automatic Control Systems (Professiya, Moscow, 2004) [in Russian].
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Original Russian Text © S.M. Afonin, 2010, published in Izvestiya Akademii Nauk. Mekhanika Tverdogo Tela, 2010, No. 1, pp. 154–165.
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Afonin, S.M. Design of static and dynamic characteristics of a piezoelectric nanomicrotransducer. Mech. Solids 45, 123–132 (2010). https://doi.org/10.3103/S0025654410010152
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DOI: https://doi.org/10.3103/S0025654410010152