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Design of static and dynamic characteristics of a piezoelectric nanomicrotransducer

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Abstract

We design the static and dynamic characteristics of a piezoelectric nanomicrotransducer intended for use in nanotechnology and microelectronic hardware, devise its parametric structural schematic diagram, and determine the influence of its physical and geometric parameters on its static and dynamic characteristics.

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Authors and Affiliations

  1. Moscow State Institute of Electronic Technology (Technical University), pr-d 4806-5, Zelenograd, Moscow, 124498, Russia

    S. M. Afonin

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  1. S. M. Afonin
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Correspondence to S. M. Afonin.

Additional information

Original Russian Text © S.M. Afonin, 2010, published in Izvestiya Akademii Nauk. Mekhanika Tverdogo Tela, 2010, No. 1, pp. 154–165.

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Afonin, S.M. Design of static and dynamic characteristics of a piezoelectric nanomicrotransducer. Mech. Solids 45, 123–132 (2010). https://doi.org/10.3103/S0025654410010152

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  • DOI: https://doi.org/10.3103/S0025654410010152

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